Apparatus with temperature self-compensation and method thereof
    1.
    发明授权
    Apparatus with temperature self-compensation and method thereof 有权
    具有温度自补偿的装置及其方法

    公开(公告)号:US08419271B2

    公开(公告)日:2013-04-16

    申请号:US12789289

    申请日:2010-05-27

    IPC分类号: G01K7/16

    CPC分类号: G01N29/022

    摘要: A system for compensating a thermal effect is provided and includes a substrate structure and a microcantilever. The substrate structure includes a first piezoresistor. The first piezoresistor is buried in the substrate structure and has a first piezoresistance having a first relation to a first variable temperature. The microcantilever has the thermal effect and a second piezoresistance having a second relation to the first variable temperature, wherein the thermal effect is compensated based on the first and the second relations.

    摘要翻译: 提供了用于补偿热效应的系统,并且包括衬底结构和微悬臂梁。 衬底结构包括第一压电电阻器。 第一压电电阻器被埋在衬底结构中,并且具有与第一可变温度具有第一关系的第一压电阻。 微悬臂梁具有热效应和与第一可变温度具有第二关系的第二压阻,其中基于第一和第二关系补偿热效应。

    METHOD OF MODULATING RESONANT FREQUENCY OF TORSIONAL MEMS DEVICE
    2.
    发明申请
    METHOD OF MODULATING RESONANT FREQUENCY OF TORSIONAL MEMS DEVICE 失效
    调制扭转MEMS器件的谐振频率的方法

    公开(公告)号:US20100134870A1

    公开(公告)日:2010-06-03

    申请号:US12703747

    申请日:2010-02-10

    IPC分类号: G02B26/00

    CPC分类号: G02B26/0833

    摘要: A torsional MEMS device is disclosed. The torsional MEMS device includes a support structure, a platform, and at least two hinges, which connects the platform to the support structure. The platform has an active area and a non-active area. A plurality of sacrificial elements is disposed in the non-active area. If the resonant frequency of the torsional MEMS device is less than a predetermined standard resonant frequency of the torsional MEMS device, at least one sacrificial element is removed to reduce the total mass of the torsional MEMS device, and so as to increase the resonant frequency of the torsional MEMS device.

    摘要翻译: 公开了一种扭转MEMS装置。 扭转MEMS装置包括支撑结构,平台和至少两个铰链,其将平台连接到支撑结构。 该平台具有活动区域和非活动区域。 多个牺牲元件设置在非有效区域中。 如果扭转MEMS器件的谐振频率小于扭转MEMS器件的预定标准谐振频率,则去除至少一个牺牲元件以减小扭转MEMS器件的总质量,并且为了增加谐振频率 扭转MEMS器件。

    PACKAGE STRUCTURE FOR MICRO-SENSOR
    3.
    发明申请
    PACKAGE STRUCTURE FOR MICRO-SENSOR 审中-公开
    微型传感器的包装结构

    公开(公告)号:US20090057789A1

    公开(公告)日:2009-03-05

    申请号:US12186388

    申请日:2008-08-05

    IPC分类号: H01L29/00

    摘要: The invention discloses a package structure for a micro-sensor including a micro-cantilever for capturing a chemical substance. The package structure, according to the invention, includes a first substrate, a second substrate, and a casing. The first substrate thereon forms a processing circuit. The micro-sensor is bonded to a first upper surface of the first substrate and is electrically connected to the processing circuit capable of outputting a signal relative to the chemical substance sensed by the micro-sensor. The second substrate has a formed-through aperture. The second substrate is bonded to the first substrate such that the micro-sensor is disposed in the formed-through aperture. The casing is bonded to the second substrate and includes a reaction chamber in which the micro-cantilever is installed and a fluid containing the chemical substance flows into.

    摘要翻译: 本发明公开了一种用于微传感器的封装结构,其包括用于捕获化学物质的微型悬臂。 根据本发明的封装结构包括第一基板,第二基板和外壳。 其上的第一衬底形成处理电路。 微传感器结合到第一衬底的第一上表面并且电连接到能够输出相对于由微传感器感测到的化学物质的信号的处理电路。 第二基板具有成形通孔。 第二基板被结合到第一基板,使得微传感器设置在成形通孔中。 壳体结合到第二基板,并且包括其中安装微悬臂的反应室,并且含有化学物质的流体流入。

    Method for integrating image sensors with optical components
    6.
    发明授权
    Method for integrating image sensors with optical components 失效
    图像传感器与光学元件集成的方法

    公开(公告)号:US06679964B2

    公开(公告)日:2004-01-20

    申请号:US09981774

    申请日:2001-10-16

    IPC分类号: H01L2146

    摘要: The present invention is a wafer level integrating method for bonding an un-sliced wafer including image sensors and a wafer-sized substrate including optical components thereon. A zeroth order light reflective substrate is provided between the un-sliced wafer and the wafer-sized substrate. The image sensors are either CMOS or CCD image sensors. The wafer-sized substrate is a transparent plate and the optical components thereon include a blazed grating, a two-dimensional microlens array or other optical-functional elements. The wafer-sized substrate is bonded onto the zeroth order light reflective substrate by an appropriate optical adhesive to form a composite substrate. Bonding pads and bumps are provided at corresponding positions on the bonding surface of the un-sliced wafer and the composite substrate respectively so that the composite substrate and the un-sliced wafer can be bonded together through a reflow process. Alternatively, the composite substrate and the un-sliced wafer can be bonded together by cold compression or thermal compression. The resultant wafer is then sliced into separated image sensors for further packaging, such as CLCC, PLCC, QFP, QFN or QFJ. Alternatively, the resultant wafer can be packaged through a wafer-level chip scale packaging process.

    摘要翻译: 本发明是一种用于将包括图像传感器的未切片晶片和其上包括光学部件的晶片尺寸基板接合的晶片级积分方法。 在未切片的晶片和晶片尺寸的基板之间设置零级光反射基板。 图像传感器是CMOS或CCD图像传感器。 晶片尺寸的基板是透明板,并且其上的光学部件包括闪耀的光栅,二维微透镜阵列或其它光学功能元件。 晶片尺寸的基板通过合适的光学粘合剂粘合到第零级光反射基板上以形成复合基板。 在非切片晶片和复合基板的接合面上的对应位置分别设置有接合焊盘和凸块,使得复合基板和未切片的晶片可以通过回流工艺结合在一起。 或者,可以通过冷压缩或热压缩将复合衬底和未切片晶片结合在一起。 然后将得到的晶片切成分离的图像传感器以进一步包装,例如CLCC,PLCC,QFP,QFN或QFJ。 或者,所得到的晶片可以通过晶片级芯片级封装工艺进行封装。

    Micro-sensor for sensing chemical substance
    7.
    发明授权
    Micro-sensor for sensing chemical substance 失效
    用于感测化学物质的微量传感器

    公开(公告)号:US07730767B2

    公开(公告)日:2010-06-08

    申请号:US11976683

    申请日:2007-10-26

    IPC分类号: G01N9/00

    CPC分类号: G01N29/036 G01N2291/0257

    摘要: The invention discloses a micro-sensor for sensing a chemical substance. The micro-sensor according to the invention includes a substrate, a micro-cantilever, an electrode structure, and a measuring device. The micro-cantilever is formed on the substrate and has a capturing surface for capturing chemical substances. The electrode structure is for supplying an electrical field. The electrical field is disposed so as to assist the capturing surface in capturing chemical substances. The measuring device, coupled to the micro-cantilever, is for measuring a variation on a mechanical property of the micro-cantilever induced by the captured chemical substance and interpreting the variation on the mechanical property of the micro-cantilever into information relative to the chemical substance.

    摘要翻译: 本发明公开了一种感测化学物质的微型传感器。 根据本发明的微型传感器包括基底,微悬臂,电极结构和测量装置。 微悬臂形成在基板上,具有用于捕获化学物质的捕获表面。 电极结构用于提供电场。 电场被设置成辅助捕获表面捕获化学物质。 耦合到微型悬臂的测量装置用于测量由捕获的化学物质引起的微悬臂的机械性能的变化,并将微悬臂梁的机械性能的变化解释为相对于化学物质的信息 物质。

    METHOD OF MODULATING RESONANT FREQUENCY OF TORSIONAL MEMS DEVICE
    8.
    发明申请
    METHOD OF MODULATING RESONANT FREQUENCY OF TORSIONAL MEMS DEVICE 审中-公开
    调制扭转MEMS器件的谐振频率的方法

    公开(公告)号:US20100002284A1

    公开(公告)日:2010-01-07

    申请号:US12207495

    申请日:2008-09-09

    IPC分类号: G02B26/00

    CPC分类号: G02B26/0833

    摘要: A method of modulating resonant frequency of a torsional MEMS device is provided. A torsional MEMS device is provided and a resonant frequency test is performed to measure a raw frequency of the torsional MEMS device. If the raw resonant frequency of the torsional MEMS device is greater than a standard resonant frequency, at least one mass increaser is bonded to the torsional MEMS device. Therefore, the raw resonant frequency is reduced as much as the standard resonant frequency.

    摘要翻译: 提供了一种调制扭转MEMS器件的谐振频率的方法。 提供了扭转MEMS器件,并且执行谐振频率测试来测量扭转MEMS器件的原始频率。 如果扭转MEMS器件的原始共振频率大于标准谐振频率,则至少一个质量增量器结合到扭转MEMS器件。 因此,原始谐振频率与标准谐振频率一样降低。

    Micro-Stamping Method for Photoelectric Process
    9.
    发明申请
    Micro-Stamping Method for Photoelectric Process 审中-公开
    光电工艺微冲压方法

    公开(公告)号:US20090038492A1

    公开(公告)日:2009-02-12

    申请号:US12189608

    申请日:2008-08-11

    IPC分类号: B41K1/42

    摘要: This invention discloses a micro-stamping method for photoelectric process. First of all, in this invention, the micro-stamping method provides a stamp, an ink, an inkpad and a substrate, wherein the stamp or the inkpad having specific protruding bodies and the ink is one element of the group consisting of red ink, green ink and blue ink. Further, by adherence of the ink to the stamp, the specific pattern can be transferred to the surface of the substrate. Furthermore, this micro-stamping method comprises an ink adherence process, a positioning process, a pattern transferring process and a fixation process, and the above-mentioned processes will repeat until the three inks, such as red ink, green ink and blue ink, all adhered and fixed on the predetermined places of substrate. Moreover, this invention can be applied in the fabricating of color filters of TFT-LCD, emitting layers of OLED (Organic Light Emitting Diode), emitting layers of PLED (Polymer Light Emitting Diode) or other related photoelectric processes.

    摘要翻译: 本发明公开了一种用于光电工艺的微型冲压方法。 首先,在本发明中,微冲压方法提供印模,油墨,墨垫和基材,其中具有特定突起体的印模或墨垫和墨是由红墨水, 绿色墨水和蓝色墨水。 此外,通过将油墨粘附到印模上,可以将特定图案转印到基板的表面。 此外,这种微冲压方法包括油墨附着工艺,定位工艺,图案转印工艺和定影工艺,并且上述过程将重复进行,直到三种油墨如红色油墨,绿色油墨和蓝色油墨, 全部粘附并固定在基板的预定位置上。 此外,本发明可以应用于制造TFT-LCD的滤色器,OLED(有机发光二极管)的发光层,PLED(聚合物发光二极管)发射层或其他相关的光电工艺的发光层。

    Micro-sensor for sensing chemical substance
    10.
    发明申请
    Micro-sensor for sensing chemical substance 失效
    用于感测化学物质的微量传感器

    公开(公告)号:US20090019934A1

    公开(公告)日:2009-01-22

    申请号:US11976683

    申请日:2007-10-26

    IPC分类号: G01H13/00

    CPC分类号: G01N29/036 G01N2291/0257

    摘要: The invention discloses a micro-sensor for sensing a chemical substance. The micro-sensor according to the invention includes a substrate, a micro-cantilever, an electrode structure, and a measuring device. The micro-cantilever is formed on the substrate and has a capturing surface for capturing chemical substances. The electrode structure is for supplying an electrical field. The electrical field is disposed so as to assist the capturing surface in capturing chemical substances. The measuring device, coupled to the micro-cantilever, is for measuring a variation on a mechanical property of the micro-cantilever induced by the captured chemical substance and interpreting the variation on the mechanical property of the micro-cantilever into information relative to the chemical substance.

    摘要翻译: 本发明公开了一种感测化学物质的微型传感器。 根据本发明的微传感器包括基板,微悬臂梁,电极结构和测量装置。 微悬臂形成在基板上,具有用于捕获化学物质的捕获表面。 电极结构用于提供电场。 电场被设置成辅助捕获表面捕获化学物质。 耦合到微型悬臂的测量装置用于测量由捕获的化学物质引起的微悬臂的机械性能的变化,并将微悬臂梁的机械性能的变化解释为相对于化学物质的信息 物质。