发明授权
US07139135B2 Apparatus for adjustment of partial coherence of light energy in an imaging system
有权
用于调整成像系统中光能的部分相干性的装置
- 专利标题: Apparatus for adjustment of partial coherence of light energy in an imaging system
- 专利标题(中): 用于调整成像系统中光能的部分相干性的装置
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申请号: US10460419申请日: 2003-06-11
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公开(公告)号: US07139135B2公开(公告)日: 2006-11-21
- 发明人: Michael Goldstein , John M. Urata
- 申请人: Michael Goldstein , John M. Urata
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理商 George Chen
- 主分类号: G02B9/00
- IPC分类号: G02B9/00 ; G02B9/08 ; G03B27/54
摘要:
The present invention describes an apparatus comprising an optical array generating a distribution of partial coherence of light energy and an aperture to select a subset of said distribution of partial coherence.
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