发明授权
- 专利标题: Actuator device
- 专利标题(中): 执行机构
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申请号: US10896769申请日: 2004-07-22
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公开(公告)号: US07141915B2公开(公告)日: 2006-11-28
- 发明人: Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Natsumi Shimogawa , Takayoshi Akao
- 申请人: Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Natsumi Shimogawa , Takayoshi Akao
- 申请人地址: JP Nagoya
- 专利权人: NGK Insulators, Ltd.
- 当前专利权人: NGK Insulators, Ltd.
- 当前专利权人地址: JP Nagoya
- 代理机构: Burr & Brown
- 优先权: JP2003-277887 20030722; JP2004-195070 20040630
- 主分类号: H01L41/08
- IPC分类号: H01L41/08
摘要:
An actuator device has a drive section including a plurality of actuators arranged in a plane on a substrate, and a single first plate member to which drive forces from the actuators of the drive section are transmitted. A plurality of spacers are disposed between the first plate member and the substrate, forming m cells. Each of the actuators has a cavity, a vibrating section and a fixed section formed on the substrate. The rigidity of the first plate member is greater than the rigidity of the vibrating section of the actuator.
公开/授权文献
- US20060197413A9 Actuator Device 公开/授权日:2006-09-07
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