发明授权
US07145269B2 Lithographic apparatus, Lorentz actuator, and device manufacturing method
有权
光刻设备,洛伦兹致动器和器件制造方法
- 专利标题: Lithographic apparatus, Lorentz actuator, and device manufacturing method
- 专利标题(中): 光刻设备,洛伦兹致动器和器件制造方法
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申请号: US10796291申请日: 2004-03-10
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公开(公告)号: US07145269B2公开(公告)日: 2006-12-05
- 发明人: Sven Antoin Johan Hol , Henrikus Herman Marie Cox , Hernes Jacobs , Patricia Vreugdewater , Koen Jacobus Johannes Marie Zaal
- 申请人: Sven Antoin Johan Hol , Henrikus Herman Marie Cox , Hernes Jacobs , Patricia Vreugdewater , Koen Jacobus Johannes Marie Zaal
- 申请人地址: NL Veldhoven
- 专利权人: ASML Netherlands B.V.
- 当前专利权人: ASML Netherlands B.V.
- 当前专利权人地址: NL Veldhoven
- 代理机构: Pillsbury Winthrop Shaw Pittman LLP
- 主分类号: H02K41/00
- IPC分类号: H02K41/00
摘要:
A lithographic apparatus comprising a highly effective Lorentz actuator, is presented. The Lorentz actuator comprises a main magnet system and a subsidiary magnet system arranged in Halbach configuration, an electrically conductive element for producing a force via the interaction of an electric current carried by the electrically conductive element and a resulting field of the first and second magnetic field generated by the main and subsidiary magnet system, respectively. The actuator further comprises a magnetic element extending substantially between outer sides of the first and second magnet system subassemblies. The magnetic element guides a portion of the second, subsidiary field between the first and second magnet system subassemblies.
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