Invention Grant
- Patent Title: Micromechanical structural element having a diaphragm and method for producing such a structural element
- Patent Title (中): 具有隔膜的微机械结构元件及其制造方法
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Application No.: US10970069Application Date: 2004-10-19
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Publication No.: US07148077B2Publication Date: 2006-12-12
- Inventor: Matthias Fuertsch , Stefan Pinter , Heribert Weber , Frank Fischer , Lars Metzger , Christoph Schelling , Frieder Sundermeier
- Applicant: Matthias Fuertsch , Stefan Pinter , Heribert Weber , Frank Fischer , Lars Metzger , Christoph Schelling , Frieder Sundermeier
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE10352001 20031107
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A micromechanical structural element, having a very stable diaphragm, implemented in a pure front process and in a layer construction on a substrate. The layer construction includes at least one sacrificial layer and one diaphragm layer above the sacrificial layer, which is structured for laying bare the diaphragm and generating stabilizing elements on the diaphragm, at least one recess being generated for a stabilizing element of the diaphragm. The structure generated in the sacrificial layer is then at least superficially closed with at least one material layer being deposited above the structured sacrificial layer, this material layer forming at least a part of the diaphragm layer and being structured to generate at least one etch hole for etching the sacrificial layer, which is removed from the region under the etch hole, the diaphragm and the at least one stabilizing element being laid bare, a cavity being created under the diaphragm.
Public/Granted literature
- US20050098840A1 Micromechanical structural element having a diaphragm and method for producing such a structural element Public/Granted day:2005-05-12
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