Invention Grant
- Patent Title: Method for manufacturing metal structure having different heights
- Patent Title (中): 具有不同高度的金属结构的制造方法
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Application No.: US11012312Application Date: 2004-12-16
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Publication No.: US07148141B2Publication Date: 2006-12-12
- Inventor: Dong-sik Shim , Chan-bong Jun , Hyung Choi , Hoon Song
- Applicant: Dong-sik Shim , Chan-bong Jun , Hyung Choi , Hoon Song
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2003-0092620 20031217
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
Disclosed is a method for forming a plurality of metal structures having different heights on a semiconductor substrate. The disclosed method for manufacturing a metal structure having different heights includes: forming a plurality of seed layers, to have heights corresponding to the metal structure to be formed, on a semiconductor substrate so that those layers can be electrically separated, performing a plating process using a plating mold, and applying different currents to the respective seed layers so that the plating thickness can be adjusted for each of the seed layers. Accordingly, a plurality of metal structures having different heights can be obtained by a plating mold forming process and a plating process that are performed just once, respectively.
Public/Granted literature
- US20050136636A1 Method for manufacturing metal structure having different heights Public/Granted day:2005-06-23
Information query
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