A miniaturized X-ray source is disclosed. It comprises an anode structure (43) and a cathode structure (41), each having an essentially pointed portion (44, 42), wherein at least the pointed portions being directed towards each other and enclosed in a vacuum cavity (49). The anode structure has an essentially dome shaped structure having a first essentially flat part (46) surrounded by a second essentially flat part (48), connected by a wall section (47), such that said first and second parts are located at different levels. The pointed portion is provided on said first flat portion and having an extension such that the apex of said pointed portion does not extend beyond the level of said second essentially flat part. A method of making an X-ray source is also disclosed.