- 专利标题: Capacitive pressure sensor
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申请号: US10518546申请日: 2003-07-01
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公开(公告)号: US07150197B2公开(公告)日: 2006-12-19
- 发明人: Frank Hegner , Ulfert Drewes , Igor Getman
- 申请人: Frank Hegner , Ulfert Drewes , Igor Getman
- 申请人地址: DE Maulburg
- 专利权人: Endress + Hauser GmbH + Co. KG
- 当前专利权人: Endress + Hauser GmbH + Co. KG
- 当前专利权人地址: DE Maulburg
- 代理机构: Bacon & Thomas
- 优先权: DE10229703 20020702
- 国际申请: PCT/EP03/06961 WO 20030701
- 国际公布: WO2004/005875 WO 20040115
- 主分类号: G01L9/12
- IPC分类号: G01L9/12
摘要:
For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, wherein the pressure measuring cell is axially clamped between an elastic sealing ring, which bears against the membrane-containing, end face of the pressure measuring cell, and a support ring, which supports the measuring cell on the rear side thereof, the dimensions of the support ring are matched to the dimensions of the sealing ring and the pressure measuring cell in such a way that a radial deformation of the membrane-containing end face resulting from the axial clamping of the pressure measuring cell is sufficiently small that the span error of the pressure sensor because of a reduction of the axial clamping force by a least 10% amounts to not more than 0.02%. The geometry of the support ring is determined iteratively by means of the FEM.
公开/授权文献
- US20060096381A1 Capacitive pressure sensor 公开/授权日:2006-05-11
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