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    Capacitive pressure sensor
    1.
    发明授权
    Capacitive pressure sensor 有权

    公开(公告)号：US07150197B2

    公开(公告)日：2006-12-19

    申请号：US10518546

    申请日：2003-07-01

    申请人： Frank Hegner ,  Ulfert Drewes ,  Igor Getman

    发明人： Frank Hegner ,  Ulfert Drewes ,  Igor Getman

    IPC分类号： G01L9/12

    CPC分类号： G01L19/02 ,  G01L9/0075

    摘要： For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, wherein the pressure measuring cell is axially clamped between an elastic sealing ring, which bears against the membrane-containing, end face of the pressure measuring cell, and a support ring, which supports the measuring cell on the rear side thereof, the dimensions of the support ring are matched to the dimensions of the sealing ring and the pressure measuring cell in such a way that a radial deformation of the membrane-containing end face resulting from the axial clamping of the pressure measuring cell is sufficiently small that the span error of the pressure sensor because of a reduction of the axial clamping force by a least 10% amounts to not more than 0.02%. The geometry of the support ring is determined iteratively by means of the FEM.

    Capacitive pressure sensor
    2.
    发明授权
    Capacitive pressure sensor 有权
    电容式压力传感器

    公开(公告)号：US07249515B2

    公开(公告)日：2007-07-31

    申请号：US10528094

    申请日：2003-09-09

    申请人： Frank Hegner ,  Igor Getman ,  Ulfert Drewes

    发明人： Frank Hegner ,  Igor Getman ,  Ulfert Drewes

    IPC分类号： G01L19/04

    CPC分类号： G01L9/0075

    摘要： For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, with the pressure measuring cell being axially clamped between an elastic sealing ring, which bears against the membrane-bearing end face of the pressure measuring cell, and a support ring, which bears against the rear face of the pressure measuring cell, the dimensions of the support ring are coordinated with the dimensions of the sealing ring and pressure measuring cell such that a radial deformation of the membrane-bearing end face caused by the axial clamping of the pressure measuring cell is sufficiently small that the span error of the pressure sensor arising from a reduction of the axial clamping force by at least 10% amounts to not more than about 0.02%. Additionally, arranged between the support ring and a clamping ring is a stiff decoupling element, which minimizes the temperature hysteresis of the span. The geometry of the support ring and the decoupling element is determined iteratively by means of FEM.

    摘要翻译： 为了最小化具有基本圆柱形平台的压力传感器的跨度误差和连接到平台的端面的测量膜，其中压力测量单元被轴向夹紧在弹性密封环之间，该弹性密封环承载在膜支承端面 的压力测量单元和支撑环，其支撑在压力测量单元的后表面上，支撑环的尺寸与密封环和压力测量单元的尺寸协调，使得膜的径向变形 由压力测量单元的轴向夹紧引起的端面的距离足够小，使得由轴向夹紧力减小至少10％所引起的压力传感器的跨度误差不大于约0.02％。 此外，布置在支撑环和夹紧环之间的是刚性去耦元件，其使跨度的温度滞后最小化。 通过有限元法迭代地确定支撑环和去耦元件的几何形状。

    Capacitive pressure sensor
    3.
    发明申请
    Capacitive pressure sensor 有权
    电容式压力传感器

    公开(公告)号：US20060185435A1

    公开(公告)日：2006-08-24

    申请号：US10528094

    申请日：2003-09-09

    申请人： Frank Hegner ,  Igor Getman ,  Ulfert Drewes

    发明人： Frank Hegner ,  Igor Getman ,  Ulfert Drewes

    IPC分类号： G01L19/04

    CPC分类号： G01L9/0075

    摘要： For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, with the pressure measuring cell being axially clamped between an elastic sealing ring, which bears against the membrane-bearing end face of the pressure measuring cell, and a support ring, which bears against the rear face of the pressure measuring cell, the dimensions of the support ring are coordinated with the dimensions of the sealing ring and pressure measuring cell such that a radial deformation of the membrane-bearing end face caused by the axial clamping of the pressure measuring cell is sufficiently small that the span error of the pressure sensor arising from a reduction of the axial clamping force by at least 10% amounts to not more than about 0.02%. Additionally, arranged between the support ring and a clamping ring is a stiff decoupling element, which minimizes the temperature hysteresis of the span. The geometry of the support ring and the decoupling element is determined iteratively by means of FEM.

    摘要翻译： 为了最小化具有基本圆柱形平台的压力传感器的跨度误差和连接到平台的端面的测量膜，其中压力测量单元被轴向夹紧在弹性密封环之间，该弹性密封环承载在膜支承端面 的压力测量单元和支撑环，其支撑在压力测量单元的后表面上，支撑环的尺寸与密封环和压力测量单元的尺寸协调，使得膜的径向变形 由压力测量单元的轴向夹紧引起的端面的距离足够小，使得由轴向夹紧力减小至少10％所引起的压力传感器的跨度误差不大于约0.02％。 此外，布置在支撑环和夹紧环之间的是刚性去耦元件，其使跨度的温度滞后最小化。 通过有限元法迭代地确定支撑环和去耦元件的几何形状。

    Capacitive pressure sensor
    4.
    发明申请
    Capacitive pressure sensor 有权
    电容式压力传感器

    公开(公告)号：US20060096381A1

    公开(公告)日：2006-05-11

    申请号：US10518546

    申请日：2003-07-01

    申请人： Frank Hegner ,  Ulfert Drewes ,  Igor Getman

    发明人： Frank Hegner ,  Ulfert Drewes ,  Igor Getman

    IPC分类号： G01L9/12

    CPC分类号： G01L19/02 ,  G01L9/0075

    摘要： For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, wherein the pressure measuring cell is axially clamped between an elastic sealing ring, which bears against the membrane-containing, end face of the pressure measuring cell, and a support ring, which supports the measuring cell on the rear side thereof, the dimensions of the support ring are matched to the dimensions of the sealing ring and the pressure measuring cell in such a way that a radial deformation of the membrane-containing end face resulting from the axial clamping of the pressure measuring cell is sufficiently small that the span error of the pressure sensor because of a reduction of the axial clamping force by a least 10% amounts to not more than 0.02%. The geometry of the support ring is determined iteratively by means of the FEM.

    摘要翻译： 为了最小化具有基本圆柱形平台的压力传感器和连接到平台端面的测量膜的压力传感器的跨度误差，其中压力测量单元被轴向夹紧在弹性密封环之间，弹性密封环承载在含膜的末端 压力测量单元的表面和支撑环，支撑环在其后侧支撑测量单元，支撑环的尺寸与密封环和压力测量单元的尺寸匹配，使得径向 由压力测量单元的轴向夹紧导致的含膜端面的变形足够小，由于轴向夹紧力减小至少10％，压力传感器的跨度误差不大于0.02％ 。 通过FEM迭代地确定支撑环的几何形状。

    CAPACITIVE PRESSURE SENSOR
    5.
    发明申请
    CAPACITIVE PRESSURE SENSOR 有权
    电容式压力传感器

    公开(公告)号：US20100199778A1

    公开(公告)日：2010-08-12

    申请号：US12451209

    申请日：2008-06-04

    申请人： Frank Hegner ,  Andreas Rossberg ,  Ulfert Drewes ,  Elke Schmidt ,  Sabine Stolle ,  Christel Kretschmar ,  Melanie Hentsche

    发明人： Frank Hegner ,  Andreas Rossberg ,  Ulfert Drewes ,  Elke Schmidt ,  Sabine Stolle ,  Christel Kretschmar ,  Melanie Hentsche

    IPC分类号： G01L9/12 ,  H01R43/00

    CPC分类号： G01L9/0075 ,  G01L13/025 ,  Y10T29/49117

    摘要： A pressure sensor includes a platform 1 and an elastic measuring membrane 2, which is joined with a surface of the platform 1 to form a measuring chamber 3 sealed closed at the edge, wherein the platform 1 and/or the measuring membrane 2 comprise ceramic, glass or a single crystal material, the measuring membrane has at least a first electrode 6, which faces the surface of the platform 2, the surface of the platform 1 has at least a second electrode 5, which faces that of the measuring membrane 2, wherein the capacitance between the first electrode and the second electrode is a measure for the pressure to be measured; wherein additionally at least one of the first and second electrodes comprises a conductive layer, which contains metal and glass, and wherein the metal comprises at least two noble metal elements.

    摘要翻译： 压力传感器包括平台1和弹性测量膜2，其与平台1的表面接合以形成密封在边缘处的测量室3，其中平台1和/或测量膜2包括陶瓷， 玻璃或单晶材料，测量膜至少具有面向平台2的表面的第一电极6，平台1的表面至少具有与测量膜2的表面相对的第二电极5， 其中所述第一电极和所述第二电极之间的电容是待测压力的量度; 其中另外所述第一和第二电极中的至少一个包括含有金属和玻璃的导电层，并且其中所述金属包括至少两种贵金属元素。

    Pressure transducer
    6.
    发明申请
    Pressure transducer 有权
    压力传感器

    公开(公告)号：US20090211363A1

    公开(公告)日：2009-08-27

    申请号：US11631036

    申请日：2005-06-14

    申请人： Ulfert Drewes ,  Frank Hegner

    发明人： Ulfert Drewes ,  Frank Hegner

    IPC分类号： G01L9/00

    CPC分类号： G01L19/145 ,  G01L19/147

    摘要： A pressure transducer, including a housing having a housing axis and a measuring cell chamber defined in the housing. The measuring cell chamber is exposable to a pressure via an opening. The opening is surrounded by an annular, first sealing surface. A pressure measuring cell having a second sealing surface facing towards the opening, and a support surface facing away from the sealing surface, sealing ring; and a clamping apparatus, which engages the housing are provided. The pressure measuring cell and the sealing ring are clamped by means of an axial claimping force in such a manner between the clamping apparatus and the first sealing surface, that the sealing ring is arranged pressure-tightly between the first sealing surface and the second sealing surface. The pressure transducer further includes a misalignment accommodating arrangement, which includes a first transmission body, which faces toward the opening, and a second transmission body, which is facing away from the opening. The axial clamping formce is transmitted through the misalignment accommodating arrangement from the clamping apparatus to the pressure measuring cell, and the first transmission body is tiltable relative to the second transmission body about two mutually perpendicular axes.

    摘要翻译： 一种压力传感器，包括具有壳体轴线的壳体和限定在壳体中的测量室室。 测量池室可通过开口暴露于压力。 开口被环形的第一密封表面包围。 一种压力测量单元，具有面向开口的第二密封表面和背离密封表面的支承表面，密封环; 并且提供与壳体接合的夹紧装置。 压力测量单元和密封环借助于夹紧装置和第一密封表面之间的这种方式被夹紧，密封环压紧地设置在第一密封表面和第二密封表面之间 。 压力传感器还包括不对准容纳装置，其包括朝向开口的第一传动体，以及远离开口的第二传递体。 轴向夹紧通过不对准容纳装置从夹紧装置传递到压力测量单元，并且第一传动体相对于第二传动体绕两个相互垂直的轴线倾斜。

    Pressure sensor
    7.
    发明申请
    Pressure sensor 有权
    压力传感器

    公开(公告)号：US20070028696A1

    公开(公告)日：2007-02-08

    申请号：US10566364

    申请日：2004-07-16

    申请人： Ulfert Drewes ,  Karl Floegel ,  Frank Hegner ,  Thomas Uehlin ,  Rainer Martin

    发明人： Ulfert Drewes ,  Karl Floegel ,  Frank Hegner ,  Thomas Uehlin ,  Rainer Martin

    IPC分类号： G01L7/00

    CPC分类号： G01L19/003

    摘要： A pressure sensor including: A pressure measuring cell having an end face loadable with the medium; a housing having a media opening and a ring-shaped, axial bearing surface, which surrounds the media opening; a clamping apparatus; and a ring-shaped sealing arrangement. The pressure measuring cell is positioned in the housing and the sealing arrangement is positioned between the bearing surface and the end face, and the sealing arrangement, as well as the pressure measuring cell, are axially clamped between the bearing surface and the clamping apparatus. The sealing arrangement includes, a decoupling ring, as well as a first and a second, ring-shaped sealing element. The first sealing element lies against the end face, the second sealing element lies against the bearing surface, and the decoupling ring is axially clamped between the first and the second sealing elements.

    摘要翻译： 一种压力传感器，包括：压力测量单元，其具有可与介质一起装载的端面; 壳体，其具有介质开口和围绕介质开口的环形的轴向支承表面; 夹紧装置; 和环形密封装置。 压力测量单元位于壳体中，并且密封装置位于支承表面和端面之间，并且密封装置以及压力测量单元被轴向地夹紧在支承表面和夹紧装置之间。 密封装置包括脱钩环以及第一和第二环形密封元件。 第一密封元件靠在端面上，第二密封元件位于支承表面上，并且解耦环被轴向夹紧在第一和第二密封元件之间。

    Capacitive pressure sensor or capacitive differential pressure sensor
    8.
    发明授权
    Capacitive pressure sensor or capacitive differential pressure sensor 失效
    电容式压力传感器或电容差压传感器

    公开(公告)号：US06374680B1

    公开(公告)日：2002-04-23

    申请号：US09511723

    申请日：2000-02-21

    申请人： Ulfert Drewes ,  Andreas Rossberg ,  Elke Schmidt ,  Frank Hegner ,  Thomas Velten

    发明人： Ulfert Drewes ,  Andreas Rossberg ,  Elke Schmidt ,  Frank Hegner ,  Thomas Velten

    IPC分类号： G01L912

    CPC分类号： G01L9/0075

    摘要： The electrodes of these pressure or differential pressure sensors are formed using a technique other than silk-screen printing or sputtering: The pressure sensor (10) has a substrate (1) and a first major surface (11), a second major surface (12) and a circumferential surface (13. A plate-shaped electrode (14) of electrically conductive material is secured in a recess (15) in the major surface (11) in a high-pressure-resistant and high-vacuum-tight manner by a joining material (16). A through connection (17) is provided from the electrode (14) through the substrate (1) to the major surface (12) or the circumferential surface (13). A diaphragm (2) of ceramic, glass, or single-crystal material is attached to the substrate (1) outside the recess (15) along a joint (18) by a joining material (26), and forms itself a further electrode or is covered, on a surface facing the electrode (14), with a further electrode (24) which is contacted through the joint (18). Substrate and diaphragm consist of a ceramic, glass, or single-crystal material. Respective differential pressure sensors have either a common central diaphragm and two substrates or a common substrate and two diaphragms.

    摘要翻译： 这些压力传感器或差压传感器的电极使用丝网印刷或溅射以外的技术来形成：压力传感器（10）具有基板（1）和第一主表面（11），第二主表面（12） ）和圆周表面（13）。导电材料的板状电极（14）以高耐压和高真空密封的方式固定在主表面（11）的凹部（15）中，由 连接材料（16），从电极（14）穿过基板（1）到主表面（12）或圆周表面（13）提供贯通连接件（17），陶瓷的隔膜（2） 玻璃或单晶材料通过接合材料（26）沿着接头（18）附接到凹部（15）外部的基板（1）上，并且在其上面形成另外的电极或被覆盖在面向 电极（14），具有通过接头（18）接触的另一个电极（24）。基板和隔膜 t的陶瓷，玻璃或单晶材料。 各差压传感器具有共同的中心隔膜和两个基板或公共基板和两个隔膜。