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US07153443B2 Microelectromechanical structure and a method for making the same 有权
微机电结构及其制造方法

Microelectromechanical structure and a method for making the same
Abstract:
A microstructure and the method for making the same are disclosed herein. The microstructure has structural members, at least one of which comprises an intermetallic compound. In making such a microstructure, a sacrificial material is employed. After completion of forming the structural layers, the sacrificial material is removed by a spontaneous vapor phase chemical etchant.
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