发明授权
US07154678B2 Projection objective having adjacently mounted aspheric lens surfaces
有权
具有相邻安装非球面透镜表面的投影物镜
- 专利标题： Projection objective having adjacently mounted aspheric lens surfaces
- 专利标题（中）： 具有相邻安装非球面透镜表面的投影物镜
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申请号： US11079225申请日： 2005-03-15
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公开(公告)号： US07154678B2公开(公告)日： 2006-12-26
- 发明人: Karl-Heinz Schuster , David R. Shafer , Wilhelm Ulrich , Helmut Beierl , Wolfgang Singer
- 申请人： Karl-Heinz Schuster , David R. Shafer , Wilhelm Ulrich , Helmut Beierl , Wolfgang Singer
- 申请人地址： DE Oberkochen
- 专利权人： Carl Zeiss Semiconductor Manufacturing Technologies AG
- 当前专利权人： Carl Zeiss Semiconductor Manufacturing Technologies AG
- 当前专利权人地址： DE Oberkochen
- 代理商 Walter Ottesen
- 优先权： DE10002626 20000122; DE10021739 20000504
- 主分类号： G02B9/00
- IPC分类号： G02B9/00 ; G02B13/18
摘要：
A projection objective has at least five lens groups (G1 to G5) and has several lens surfaces. At least two aspheric lens surfaces are arranged so as to be mutually adjacent. These mutually adjacently arranged lens surfaces are characterized as a double asphere. This at least one double asphere (21) is mounted at a minimum distance from an image plane (0′) which is greater than the maximum lens diameter (D2) of the objective.
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