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US07154734B2 Fully shielded capacitor cell structure 有权
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Fully shielded capacitor cell structure
摘要:
A linear capacitor design providing shielding on all sides of the linear capacitor. In one aspect the capacitor provides a signal side metal layer substantially enclosed by a dielectric material which is, in turn, substantially enclosed by an upper and lower metal shield layer. in another aspect, the upper and lower shield metal layers may be coupled by a plurality of vias. In another aspect, a plurality of alternating intermediate layers provide signal side metal and shield metal separated by dielectric material such that each signal side layer is substantially enclosed by one or more shield metal layers. In another aspect, multiple intermediate signal side metal layers are conductively coupled to one another by a plurality of vias and multiple shield metal layers are conductively coupled to one another by a plurality of vias.
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