发明授权
- 专利标题: Non-volatile memory and fabricating method thereof
- 专利标题(中): 非易失性存储器及其制造方法
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申请号: US11180117申请日: 2005-07-11
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公开(公告)号: US07157333B1公开(公告)日: 2007-01-02
- 发明人: Jongoh Kim , Yider Wu , Kent-Kuohua Chang
- 申请人: Jongoh Kim , Yider Wu , Kent-Kuohua Chang
- 申请人地址: TW Hsinchu
- 专利权人: Macronix International Co., Ltd.
- 当前专利权人: Macronix International Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: J.C. Patents
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A method of fabricating a non-volatile memory is provided. A plurality of columns of isolation structures are formed on a substrate. A plurality of rows of stacked gate structures crossing over the isolation structures are formed on the substrate. A plurality of doping regions are formed in the substrate between two neighboring stacked gate structures. A plurality of stripes of spacers are formed on the sidewalls of stacked gate structures. A plurality of first dielectric layers are formed on a portion of the isolation structures adjacent to two rows of stacked gate structures. Also, one isolation structure is disposed between two neighboring first dielectric layers in the same row, while two neighboring rows comprising the first dielectric layer and the isolation structure are arranged in an interlacing manner. A plurality of first conductive layers are formed between two neighboring first dielectric layers in the same row.
公开/授权文献
- US20070010055A1 NON-VOLATILE MEMORY AND FABRICATING METHOD THEREOF 公开/授权日:2007-01-11
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