发明授权
- 专利标题: Structures with seeded single-crystal domains
- 专利标题(中): 具有种子单晶畴的结构
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申请号: US11101741申请日: 2005-04-07
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公开(公告)号: US07157737B2公开(公告)日: 2007-01-02
- 发明人: Apostolos T. Voutsas , John W. Hartzell
- 申请人: Apostolos T. Voutsas , John W. Hartzell
- 申请人地址: US WA Camas
- 专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人地址: US WA Camas
- 代理商 David C. Ripma
- 主分类号: H01L29/04
- IPC分类号: H01L29/04
摘要:
Single-crystal devices and a method for forming semiconductor film single-crystal domains are provided. The method comprises: forming a substrate, such as glass or Si; forming an insulator film overlying the substrate; forming a single-crystal seed overlying the substrate and insulator; forming an amorphous film overlying the seed; annealing the amorphous film; and, forming a single-crystal domain in the film responsive to the single-crystal seed. The annealing technique can be (conventional) laser annealing, a laser induced lateral growth (LiLAC) process, or conventional furnace annealing. In some aspects, forming a single-crystal seed includes forming a nanowire or a self assembled monolayer (SAM). For example, a Si nanowire can be formed having a crystallographic orientation of or . When, the seed has a crystallographic orientation, then an n-type TFT can be formed. Likewise, when a single-crystal seed has a crystallographic orientation, a p-type TFT can be formed.
公开/授权文献
- US20050179086A1 Structures with seeded single-crystal domains 公开/授权日:2005-08-18
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