发明授权
- 专利标题: Layered support and method for laminating CMP pads
- 专利标题(中): 分层支撑和层压CMP垫的方法
-
申请号: US10754381申请日: 2004-01-09
-
公开(公告)号: US07160413B2公开(公告)日: 2007-01-09
- 发明人: Ichiro Kodaka , Charles Sischile , Alvin Timbang , Margarita Castillo , Claughton Miller
- 申请人: Ichiro Kodaka , Charles Sischile , Alvin Timbang , Margarita Castillo , Claughton Miller
- 申请人地址: US CA Hayward
- 专利权人: Mipox International Corporation
- 当前专利权人: Mipox International Corporation
- 当前专利权人地址: US CA Hayward
- 代理机构: Sheppard Mullin Richter & Hampton LLP
- 主分类号: B24D11/00
- IPC分类号: B24D11/00
摘要:
A device and method for laminating CMP pads includes supporting the CMP pad with a board having material compositions similar to the CMP pad. By thus supporting the CMP pad during lamination, there is less likelihood of damage to the CMP pad and better adhesion from lamination. In particular, the CMP pad materials are laminated while in contact with a first board that may have a recess to accept the CMP pad. The pad has dimensions that are equal to or greater than the pad material. In an alternative embodiment, a board is provided on the opposite side of the CMP pad for lamination.
公开/授权文献
- US20050150594A1 Layered support and method for laminating CMP pads 公开/授权日:2005-07-14
信息查询