Invention Grant
- Patent Title: Non-volatile memory devices
- Patent Title (中): 非易失性存储器件
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Application No.: US11007760Application Date: 2004-12-08
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Publication No.: US07161206B2Publication Date: 2007-01-09
- Inventor: Chang-Woo Oh , Dong-Gun Park , Dong-Won Kim , Yong-Kyu Lee
- Applicant: Chang-Woo Oh , Dong-Gun Park , Dong-Won Kim , Yong-Kyu Lee
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Mills & Onello LLP
- Priority: KR10-2004-0025095 20040412
- Main IPC: H02L29/788
- IPC: H02L29/788 ; H01L21/336

Abstract:
According to a nonvolatile memory device having a multi gate structure and a method for forming the same of the present invention, a gate electrode is formed using a damascene process. Therefore, a charge storage layer, a tunneling insulating layer, a blocking insulating layer and a gate electrode layer are not attacked from etching in a process for forming the gate electrode, thereby forming a nonvolatile memory device having good reliability.
Public/Granted literature
- US20050227435A1 Non-volatile memory devices and method for forming the same Public/Granted day:2005-10-13
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