Invention Grant
- Patent Title: Polarization-dependent grating interferometer for measuring optical profile depth and spectral properties of a sample
- Patent Title (中): 用于测量样品的光学轮廓深度和光谱性质的偏振相关光栅干涉仪
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Application No.: US10502195Application Date: 2003-01-21
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Publication No.: US07161683B2Publication Date: 2007-01-09
- Inventor: Thilo Weitzel
- Applicant: Thilo Weitzel
- Applicant Address: CH Urtenen-Schönbühl
- Assignee: CAMPus Technologies AG
- Current Assignee: CAMPus Technologies AG
- Current Assignee Address: CH Urtenen-Schönbühl
- Agency: Dilworth & Barrese LLP
- Priority: DE10202120 20020121
- International Application: PCT/EP03/00568 WO 20030121
- International Announcement: WO03/060422 WO 20030724
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
The present invention relates to a spectrally dispersive interferometric optical apparatus having a light source, generating a phase shift, measuring the intensity of the interference signals, selectively measuring the intensity of the interference signal and determining the phase angles and/or a relative phase shift of the intensity of the interference signals. In accordance with the invention, the generating of a phase shift between components of different polarization directions in at least one of the branches of the interferometer includes a diffraction grating. The selective determination of the intensity of the interference signal in dependence on the polarization moreover permits determination of the respective intensity for the TE components and for the TM components of the interference signal with respect to the coordinate system of the diffraction grating.
Public/Granted literature
- US20050117169A1 Interferometric optical system Public/Granted day:2005-06-02
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