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US07166335B2 Layer formation method, and substrate with a layer formed by the method 有权
层形成方法，以及通过该方法形成的层的衬底

Layer formation method, and substrate with a layer formed by the method
摘要：
A layer formation method is disclosed which comprises supplying gas to a discharge space, exciting the supplied gas at atmospheric pressure or at approximately atmospheric pressure by applying a high frequency electric field across the discharge space, and exposing a substrate to the excited gas, wherein the high frequency electric field is an electric field in which a first high frequency electric field and a second high frequency electric field are superposed, frequency ω2 of the second high frequency electric field is higher than frequency ω1 of the first high frequency electric field, strength V1 of the first high frequency electric field, strength V2 of the second high frequency electric field and strength IV of discharge starting electric field satisfy relationship V1≧IV>V2 or V1>IV≧V2, and power density of the second high frequency electric field is not less than 1 W/cm2.
摘要（中）：

公开了一种层形成方法，其包括向放电空间供应气体，通过在放电空间上施加高频电场，将基底暴露于激发气体，在大气压或大气压下激发供应的气体，其中， 高频电场是第一高频电场和第二高频电场叠加的电场，第二高频电场的频率ω2 <2>高于频率ω 1，第二高频电场的强度V SUB> 1，第二高频电场的强度V SUB> 2 < 放电起始电场的强度IV满足关系V 1 = IV> V 2或V 1 IV> = V 2 第二高频电场的功率密度不小于1W / cm 2。

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