发明授权
- 专利标题： Cold cathode field emission device and process for the production thereof, and cold cathode field emission display and process for the production thereof
- 专利标题（中）： 冷阴极场发射器件及其生产方法，以及冷阴极场发射显示及其生产方法
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申请号： US11105503申请日： 2005-04-14
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公开(公告)号： US07169628B2公开(公告)日： 2007-01-30
- 发明人: Motohiro Toyota , Ichiro Saito , Toshiki Shimamura , Masakazu Muroyama
- 申请人： Motohiro Toyota , Ichiro Saito , Toshiki Shimamura , Masakazu Muroyama
- 申请人地址： JP
- 专利权人： Sony Corporation
- 当前专利权人： Sony Corporation
- 当前专利权人地址： JP
- 代理机构： Rader Fishman & Grauer PLLC
- 代理商 Ronald P. Kananen
- 优先权： JPP2002-088857 20020327
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
A process for producing a cold cathode field emission device. A cathode electrode is formed on a front surface of a support member that transmits exposure light. An insulating layer is formed on an entire surface. A gate electrode is formed on the insulating layer. The support member is irradiated with exposure light from a back surface side of the support member through the hole as a mask for exposure. An electron-emitting-portion-forming-layer composed of a photosensitive material is formed at least inside the opening portion. The support member is irradiated with exposure light from a back surface side of the support member through the hole as a mask for exposure.
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