发明授权
- 专利标题: Structure and method for adjusting integrated circuit resistor value
- 专利标题(中): 集成电路电阻值调整的结构和方法
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申请号: US10953478申请日: 2004-09-29
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公开(公告)号: US07176781B2公开(公告)日: 2007-02-13
- 发明人: Daniel Charles Kerr , Roger W. Key , Bradley J. Albers , William A. Russell , Alan Sangone Chen
- 申请人: Daniel Charles Kerr , Roger W. Key , Bradley J. Albers , William A. Russell , Alan Sangone Chen
- 申请人地址: US PA Allentown
- 专利权人: Agere Systems Inc
- 当前专利权人: Agere Systems Inc
- 当前专利权人地址: US PA Allentown
- 主分类号: H01C1/012
- IPC分类号: H01C1/012
摘要:
A resistor formed on a material layer of a semiconductor integrated circuit and a method for forming the resistor. The resistor comprises a region of resistive material with a plurality of conductive contacts or plugs in electrical contact with and extending away from the resistive material. A first and a second interconnect line are formed overlying the plugs and in conductive contact with one or more of the plurality of plugs, such that a portion of the resistive material between the first and the second interconnect lines provides a desired resistance. According to a method of the present invention, the plurality of conductive contacts are formed using a first photolithographic mask and the first and the second interconnect lines are formed using a second photolithographic mask. The desired resistance is changed by modifying the first or the second mask such that one or more dimensions of a region of the resistive material between the first and the second interconnect lines is altered.
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