Invention Grant
US07178378B2 Resonant sensor and sensing system 失效
谐振传感器和传感系统

Resonant sensor and sensing system
Abstract:
The disclosed sensor chip includes a substrate and a moving member coupled to the substrate and disposed for movement relative to the substrate. The moving member moves relative to the substrate in a first direction and in a second direction in response to movement of the substrate. The first direction is different than the second direction. The moving member includes a plurality of receptors. The receptors are configured for selectively binding to a first measurand.
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