- 专利标题: Physical quantity sensor having multiple through holes
-
申请号: US11095469申请日: 2005-04-01
-
公开(公告)号: US07178400B2公开(公告)日: 2007-02-20
- 发明人: Minoru Murata , Kenichi Yokoyama , Makoto Asai
- 申请人: Minoru Murata , Kenichi Yokoyama , Makoto Asai
- 申请人地址: JP Kariya
- 专利权人: Denso Corporation
- 当前专利权人: Denso Corporation
- 当前专利权人地址: JP Kariya
- 代理机构: Posz Law Group, PLC
- 优先权: JP2004-133657 20040428; JP2004-118887 19200414
- 主分类号: G01P15/00
- IPC分类号: G01P15/00 ; G01P15/125
摘要:
A semiconductor physical quantity sensor includes: a substrate; a semiconductor layer supported on the substrate; a trench disposed in the semiconductor layer; and a movable portion disposed in the semiconductor layer and separated from the substrate by the trench. The movable portion includes a plurality of through-holes, each of which penetrates the semiconductor layer in a thickness direction. The movable portion is capable of displacing on the basis of a physical quantity applied to the movable portion so that the physical quantity is detected by a displacement of the movable portion. The movable portion has a junction disposed among the through-holes. The junction has a trifurcate shape.
公开/授权文献
- US20050229704A1 Physical quantity sensor having multiple through holes 公开/授权日:2005-10-20