发明授权
- 专利标题: Method of probe tip shaping and cleaning
- 专利标题(中): 探针尖端成型和清洁方法
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申请号: US11139460申请日: 2005-05-27
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公开(公告)号: US07182672B2公开(公告)日: 2007-02-27
- 发明人: Bahadir Tunaboylu , Jeff Hicklin , Ivan Pipps , Son Dang , Gerry Back
- 申请人: Bahadir Tunaboylu , Jeff Hicklin , Ivan Pipps , Son Dang , Gerry Back
- 申请人地址: SG Singapore
- 专利权人: SV Probe Pte. Ltd.
- 当前专利权人: SV Probe Pte. Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Hickman Palermo Truong & Becker LLP
- 代理商 Edward A. Becker
- 主分类号: B25B1/00
- IPC分类号: B25B1/00 ; B24D11/04 ; H01L21/66
摘要:
Methods are provided for shaping, maintaining the shape of, and cleaning a probe tip using a pad such as a multi-layer adhesive and abrasive pad. The multi-layer adhesive and abrasive pad may be formed from layers of adhesive material having abrasive particles in-between each layer. Using the pad, probe tips may be shaped as desired from an unfinished probe stock, substantially limiting the use of relatively expensive conventional machining operations. Further, the pad may also be used to maintain probe tips in a desired operating shape. Still further, the pad may be used to clean accumulated debris from the probe tip. Preferably, the maintenance and cleaning operations are performed on-line, with the probes operatively installed in connection with testing machinery.
公开/授权文献
- US20050260937A1 Method of probe tip shaping and cleaning 公开/授权日:2005-11-24
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