There are provided a novel method and technology for arraying micro-particles. Micro-particle trapping capillaries each having an inner diameter smaller than the outer diameter of probe-immobilized micro-particles are prepared. By vacuuming the inside of each micro-particle trapping capillary, only one of the micro-particles is vacuumed onto an opening at the tip thereof and taken out from holders holding a plurality of the micro-particles. The micro-particle vacuumed onto the opening at the tip of each micro-particle trapping capillary is positioned at the opening of the capillary or the edge of each channel provided in a chip, the channels each having an inlet and an outlet with a slightly larger width than the outer diameter of the micro-particle so as to allow passage of only one micro-particle. The micro-particle vacuumed onto the opening at the capillary tip is injected into the capillary from the opening of the capillary or the channel edge of the chip.