发明授权
US07185312B2 Exposure method for correcting line width variation in a photomask
有权
用于校正光掩模中线宽变化的曝光方法
- 专利标题: Exposure method for correcting line width variation in a photomask
- 专利标题(中): 用于校正光掩模中线宽变化的曝光方法
-
申请号: US10873242申请日: 2004-06-23
-
公开(公告)号: US07185312B2公开(公告)日: 2007-02-27
- 发明人: Won-tai Ki , Seung-hune Yang , Ji-hyeon Choi
- 申请人: Won-tai Ki , Seung-hune Yang , Ji-hyeon Choi
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Volentine & Whitt, P.L.L.C.
- 优先权: KR2001-57979 20010919
- 主分类号: G06F17/50
- IPC分类号: G06F17/50 ; G03C5/00
摘要:
A method for correcting line width variation occurring during a development process in fabricating a photomask and a recording medium in which the exposure method is recorded is provided, wherein pattern line width variation occurring in a development process with respect to a desirable pattern is estimated, and a corrective exposure is performed using a dose or bias of an electron beam corresponding to the estimated pattern line width variation. Accordingly, pattern line width variation occurring during a development process can be reduced.
公开/授权文献
信息查询