发明授权
US07185312B2 Exposure method for correcting line width variation in a photomask 有权
用于校正光掩模中线宽变化的曝光方法

Exposure method for correcting line width variation in a photomask
摘要:
A method for correcting line width variation occurring during a development process in fabricating a photomask and a recording medium in which the exposure method is recorded is provided, wherein pattern line width variation occurring in a development process with respect to a desirable pattern is estimated, and a corrective exposure is performed using a dose or bias of an electron beam corresponding to the estimated pattern line width variation. Accordingly, pattern line width variation occurring during a development process can be reduced.
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