Invention Grant
US07187100B2 Dimensions for a MEMS scanning mirror with ribs and tapered comb teeth
失效
具有肋和锥形梳齿的MEMS扫描镜的尺寸
- Patent Title: Dimensions for a MEMS scanning mirror with ribs and tapered comb teeth
- Patent Title (中): 具有肋和锥形梳齿的MEMS扫描镜的尺寸
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Application No.: US10828946Application Date: 2004-04-20
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Publication No.: US07187100B2Publication Date: 2007-03-06
- Inventor: Yee-Chung Fu
- Applicant: Yee-Chung Fu
- Applicant Address: US CA San Jose
- Assignee: Advanced NuMicro Systems, Inc.
- Current Assignee: Advanced NuMicro Systems, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Patent Law Group LLP
- Agent David C. Hsia
- Main IPC: G02B26/10
- IPC: G02B26/10 ; G02B26/08 ; H02N1/00
Abstract:
A micro-electro-mechanical system (MEMS) mirror device includes an mirror, bonding pads, springs, and beams connected to the mirror. The mirror has a width greater than 1000 and less than 1200 microns, a length greater than 4000 and less than 5500 microns, and a thickness greater than 240 microns. Each beam includes a plurality of rotational comb teeth and is connected by multiple springs to the bonding pads.
Public/Granted literature
- US20050231065A1 Dimensions for a MEMS scanning mirror with ribs and tapered comb teeth Public/Granted day:2005-10-20
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