Invention Grant
- Patent Title: Electrical property evaluation apparatus
- Patent Title (中): 电气性能评估仪器
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Application No.: US10809555Application Date: 2004-03-25
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Publication No.: US07187166B2Publication Date: 2007-03-06
- Inventor: Yoshiharu Sugano
- Applicant: Yoshiharu Sugano
- Applicant Address: JP
- Assignee: SII NanoTechnology Inc.
- Current Assignee: SII NanoTechnology Inc.
- Current Assignee Address: JP
- Agency: Adams & Wilks
- Priority: JP2003-091986 20030328
- Main IPC: G01N27/82
- IPC: G01N27/82 ; G01R33/12

Abstract:
An electrical property evaluation apparatus for measuring an electrical property of an object includes a magnetic field generating mechanism that generates a magnetic field in a target area on the object, and a magnetic sensor for measuring the magnetic field near the target area. A cantilever having a conducting probe is supported so that the probe can be brought into contact with the target area. A bending measurement mechanism measures an amount of bending of the cantilever when the probe is brought into contact with the object. A control section controls a moving mechanism to maintain the bending amount of the cantilever constant. A voltage source applies a voltage to the probe, and an electrical property measuring section measures a current or an electrical resistance between the probe and the object in contact with each other.
Public/Granted literature
- US20040201378A1 Electrical property evaluation apparatus Public/Granted day:2004-10-14
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