Invention Grant
US07189291B2 Method for the removal of airborne molecular contaminants using oxygen gas mixtures
有权
使用氧气混合物去除空气传播的分子污染物的方法
- Patent Title: Method for the removal of airborne molecular contaminants using oxygen gas mixtures
- Patent Title (中): 使用氧气混合物去除空气传播的分子污染物的方法
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Application No.: US10683903Application Date: 2003-10-10
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Publication No.: US07189291B2Publication Date: 2007-03-13
- Inventor: Jeffrey J. Spiegelman , Daniel Alvarez, Jr. , Allan Tram , Russell Holmes
- Applicant: Jeffrey J. Spiegelman , Daniel Alvarez, Jr. , Allan Tram , Russell Holmes
- Applicant Address: US MN Chaska
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MN Chaska
- Agency: Hamilton, Brook, Smith & Reynolds, P.C.
- Main IPC: B08B5/00
- IPC: B08B5/00
Abstract:
The present invention discloses a method for the removal of a number of molecular contaminants from surfaces within a device. A purge gas containing oxygen and/or water is introduced into the interior of the device, contacting at least a portion of the interior surfaces. A contaminated purge gas is produced by transferring a portion of the contamination from the interior surfaces into the purge gas. The contaminated purge gas is removed from the device and the process is continued until the contaminant concentration in the contaminated purge gas is below a predetermined level.
Public/Granted literature
- US20040238013A1 Method for the removal of airborne molecular contaminants using oxygen gas mixtures Public/Granted day:2004-12-02
Information query
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