发明授权
- 专利标题: Polishing composition and method for forming wiring structure using the same
- 专利标题(中): 抛光组合物及其形成方法
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申请号: US10476717申请日: 2003-03-04
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公开(公告)号: US07189684B2公开(公告)日: 2007-03-13
- 发明人: Koji Ohno , Chiyo Horikawa , Kenji Sakai , Kazusei Tamai , Katsuyoshi Ina
- 申请人: Koji Ohno , Chiyo Horikawa , Kenji Sakai , Kazusei Tamai , Katsuyoshi Ina
- 申请人地址: JP Aichi
- 专利权人: Fujimi Incorporated
- 当前专利权人: Fujimi Incorporated
- 当前专利权人地址: JP Aichi
- 代理机构: Vidas, Arrett & Steinkraus PA
- 优先权: JP2002-057497 20020304; JP2002-289201 20021001
- 国际申请: PCT/JP03/02490 WO 20030304
- 国际公布: WO03/075332 WO 20031209
- 主分类号: C09K13/00
- IPC分类号: C09K13/00
摘要:
A polishing composition capable of satisfactorily polishing a semiconductor. The first polishing composition of the present invention includes silicon dioxide, at least one component selected from periodic acids and salts thereof, at least one component selected from tetraalkyl ammonium hydroxides and tetraalkyl ammonium chlorides, hydrochloric acid, and water, and contains substantially no iron. The second polishing composition of the present invention includes a predetermined amount of fumed silica, a predetermined amount of at least one component selected from periodic acids and salts thereof, a tetraalkyl ammonium salt represented by the following general formula (1), at least one component selected from ethylene glycol and propylene glycol, and water. The pH of the second polishing composition is greater than or equal to 1.8 and is less than 4.0.
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