Invention Grant
- Patent Title: Detection device
- Patent Title (中): 检测装置
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Application No.: US10887539Application Date: 2004-07-08
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Publication No.: US07190451B2Publication Date: 2007-03-13
- Inventor: Volker Seyfried , Bernd Widzgowski
- Applicant: Volker Seyfried , Bernd Widzgowski
- Applicant Address: DE Wetzlar
- Assignee: Leica Microsystems CMS GmbH
- Current Assignee: Leica Microsystems CMS GmbH
- Current Assignee Address: DE Wetzlar
- Agency: Darby & Darby
- Priority: DE10332193 20030715
- Main IPC: G01J3/28
- IPC: G01J3/28

Abstract:
A detection device includes a spectral splitting device located in a detection beam path for spectrally splitting detection light into individual spectral components. A deflection device is located downstream of the spectral splitting device for deflecting the individual spectral components in different deflection directions onto detectors assigned to the individual spectral components. At least one optical element is located in the detection beam path downstream of the spectral splitting device and upstream of the deflection device such that at least one of the individual spectral components incident on the deflection device is collimated.
Public/Granted literature
- US20050254048A9 Detection device Public/Granted day:2005-11-17
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