发明授权
US07200779B1 Fault notification based on a severity level 失效
基于严重性级别的故障通知

Fault notification based on a severity level
摘要:
A method and apparatus is provided for fault notification based on a severity level. The method comprises detecting a fault associated with a processing tool that is adapted to process one or more workpieces, determining a fault severity level of the detected fault and selecting at least one user to notify of the fault based on the severity level of the fault.
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