发明授权
US07202173B2 Systems and methods for electrical contacts to arrays of vertically aligned nanorods
有权
用于电接触垂直排列的纳米棒阵列的系统和方法
- 专利标题： Systems and methods for electrical contacts to arrays of vertically aligned nanorods
- 专利标题（中）： 用于电接触垂直排列的纳米棒阵列的系统和方法
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申请号： US11015665申请日： 2004-12-20
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公开(公告)号： US07202173B2公开(公告)日： 2007-04-10
- 发明人: Thomas Hantschel , Noble M. Johnson , Peter Kiesel , Christian G. Van De Walle , William S. Wong
- 申请人： Thomas Hantschel , Noble M. Johnson , Peter Kiesel , Christian G. Van De Walle , William S. Wong
- 申请人地址： US CA Palo Alto
- 专利权人： Palo Alto Research Corporation Incorporated
- 当前专利权人： Palo Alto Research Corporation Incorporated
- 当前专利权人地址： US CA Palo Alto
- 代理机构： Oliff & Berridge, PLC
- 主分类号： H01L21/311
- IPC分类号： H01L21/311 ; H01L21/31 ; H01L21/469
摘要：
Systems and methods may provide electrical contacts to an array of substantially vertically aligned nanorods. The nanorod array may be fabricated on top of a conducting layer that serves as a bottom contact to the nanorods. A top metal contact may be applied to a plurality of nanorods of the nanorod array. The contacts may allow I/V (current/voltage) characteristics of the nanorods to be measured.
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