发明授权
- 专利标题: Manufacturing method of acoustic sensor
- 专利标题(中): 声传感器制造方法
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申请号: US11185775申请日: 2005-07-21
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公开(公告)号: US07204009B2公开(公告)日: 2007-04-17
- 发明人: Takao Kawamura , Yoshiaki Ohbayashi , Mamoru Yasuda
- 申请人: Takao Kawamura , Yoshiaki Ohbayashi , Mamoru Yasuda
- 申请人地址: JP Yao-shi
- 专利权人: Hosiden Electronics Co., Ltd.
- 当前专利权人: Hosiden Electronics Co., Ltd.
- 当前专利权人地址: JP Yao-shi
- 代理机构: Arent Fox LLP
- 优先权: JP9-255947 19970903; JP10-194994 19980624
- 主分类号: H04R31/00
- IPC分类号: H04R31/00
摘要:
The present invention relates to a semiconductor electret condenser microphone capable of being reduced in size and including an acoustic sensor 100 and a case 200 for accommodating the acoustic sensor 100, the acoustic sensor 100 has a semiconductor chip 110 forming necessary electronic circuits 111A to 111C, and opening a through hole 112 away from the electronic circuits 111A to 111C, an electrode layer 120 formed on the surface of the semiconductor chip 110 away from the through hole 112, an electret member 130 laminated away from part of the electrode layer 120 and through hole 112, and a diaphragm 140 provided with a spacing 160 to the electret member 130, in which the electrode layer 120 exposed from the electret member 130 is connected to the electrode 111a of the electronic circuit 111A through the case 200 (FIG. 6).
公开/授权文献
- US20050251995A1 Manufacturing method of acoustic sensor 公开/授权日:2005-11-17
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