发明授权
- 专利标题: Dynamic activation for an atomic force microscope and method of use thereof
- 专利标题(中): 原子力显微镜的动态激活及其使用方法
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申请号: US11415602申请日: 2006-05-02
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公开(公告)号: US07204131B2公开(公告)日: 2007-04-17
- 发明人: Dennis M. Adderton , Stephen C. Minne
- 申请人: Dennis M. Adderton , Stephen C. Minne
- 申请人地址: US NY Woodbury
- 专利权人: Veeco Instruments Inc.
- 当前专利权人: Veeco Instruments Inc.
- 当前专利权人地址: US NY Woodbury
- 代理机构: Boyle Fredrickson Newholm Stein & Gratz S.C.
- 主分类号: G01B5/28
- IPC分类号: G01B5/28 ; G01N13/16
摘要:
A scanning probe microscope method and apparatus that modifies imaging dynamics using an active drive technique to optimize the bandwidth of amplitude detection. The deflection is preferably measured by an optical detection system including a laser and a photodetector, which measures cantilever deflection by an optical beam bounce technique or another conventional technique. The detected deflection of the cantilever is subsequently demodulated to give a signal proportional to the amplitude of oscillation of the cantilever, which is thereafter used to drive the cantilever.
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