发明授权
- 专利标题: Device and method for measuring thickness
- 专利标题(中): 厚度测量装置及方法
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申请号: US11368095申请日: 2006-03-02
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公开(公告)号: US07204146B2公开(公告)日: 2007-04-17
- 发明人: Ichiro Ishimaru , Takahiro Okuda
- 申请人: Ichiro Ishimaru , Takahiro Okuda
- 申请人地址: JP Kagawa
- 专利权人: Techno Network Shikoku Co., Ltd.
- 当前专利权人: Techno Network Shikoku Co., Ltd.
- 当前专利权人地址: JP Kagawa
- 代理机构: Beyer Weaver & Thomas LLP
- 优先权: JP2003-313350 20030905
- 主分类号: G01N29/46
- IPC分类号: G01N29/46
摘要:
A device for measuring thickness of an object has a vibration generator for generating vibrations in the object, a vibration detector for detecting vibrations generated in the object by the vibration generator and a frequency analyzer for calculating resonance frequency of the object. The vibration generator includes a light-emitting part which emits light towards the object to irradiate and to be absorbed by the object. A plurality of vibration detectors may be used and the frequency analyzer may include a sound speed analyzer for calculating speed of sound inside the object from vibrations detected by these plurality of vibration detectors.
公开/授权文献
- US20060144147A1 Device and method for measuring thickness 公开/授权日:2006-07-06
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