发明授权
- 专利标题: Dry air-supplying apparatus and treating apparatus
- 专利标题(中): 干燥供气装置和处理装置
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申请号: US10528230申请日: 2003-09-19
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公开(公告)号: US07207123B2公开(公告)日: 2007-04-24
- 发明人: Takashi Tanahashi , Takanobu Asano , Ken Nakao , Katsuhiro Yamashita
- 申请人: Takashi Tanahashi , Takanobu Asano , Ken Nakao , Katsuhiro Yamashita
- 申请人地址: JP Tokyo JP Tokyo-To
- 专利权人: Tokyo Electron Limited,Nichias Corporation
- 当前专利权人: Tokyo Electron Limited,Nichias Corporation
- 当前专利权人地址: JP Tokyo JP Tokyo-To
- 代理机构: Smith, Gambrell & Russell, LLP
- 优先权: JP2002/274214 20020920
- 国际申请: PCT/JP03/12004 WO 20030919
- 国际公布: WO2004/026442 WO 20040401
- 主分类号: F26B21/06
- IPC分类号: F26B21/06
摘要:
Two rotors 18a, 18b each housing a honeycomb structure 25 carrying an absorbent is driven for rotation by a common motor 19. Partitioning members 17 define an absorbing zone S and a recovery zone U in the rotor depending on the angular positional relationship between the partitioning members 17 and the rotor corresponding thereto. In the absorbing zone S, the absorbent removes moisture and organic matters from air passing therethrough. In the recovery zone U, recovery of the absorbent deteriorated by absorbing the moisture and the organic matters is preformed by using heated dry air. Air sucked from a transfer space 10 of the processing system sequentially passes through the absorbing zones of both the rotors via a circulation passage 20, thereafter returned to the transfer space. A part of clean dry air having passed through the absorbing zones of both the rotors is supplied into an exhaust passage 21, and is heated by a heater, and passes through the recovery zones of both the rotors.
公开/授权文献
- US20050246918A1 Dry air-supplying apparatus and treating apparatus 公开/授权日:2005-11-10
信息查询
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