发明授权
- 专利标题: Non-volatile memory resistor cell with nanotip electrode
- 专利标题(中): 带纳米尖电极的非易失性存储器电阻单元
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申请号: US11039544申请日: 2005-01-19
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公开(公告)号: US07208372B2公开(公告)日: 2007-04-24
- 发明人: Sheng Teng Hsu , Fengyan Zhang , Gregory M. Stecker , Robert A. Barrowcliff
- 申请人: Sheng Teng Hsu , Fengyan Zhang , Gregory M. Stecker , Robert A. Barrowcliff
- 申请人地址: US WA Camas
- 专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人地址: US WA Camas
- 代理机构: Law Office of Gerald Maliszewski
- 代理商 Gerald Maliszewski
- 主分类号: H01L21/06
- IPC分类号: H01L21/06 ; H01L21/461
摘要:
A non-volatile memory resistor cell with a nanotip electrode, and corresponding fabrication method are provided. The method comprises: forming a first electrode with nanotips; forming a memory resistor material adjacent the nanotips; and, forming a second electrode adjacent the memory resistor material, where the memory resistor material is interposed between the first and second electrodes. Typically, the nanotips are iridium oxide (IrOx) and have a tip base size of about 50 nanometers, or less, a tip height in the range of 5 to 50 nm, and a nanotip density of greater than 100 nanotips per square micrometer. In one aspect, the substrate material can be silicon, silicon oxide, silicon nitride, or a noble metal. A metalorganic chemical vapor deposition (MOCVD) process is used to deposit Ir. The IrOx nanotips are grown from the deposited Ir.
公开/授权文献
- US20060160304A1 Non-volatile memory resistor cell with nanotip electrode 公开/授权日:2006-07-20
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