Invention Grant
US07208397B2 Transistor having an asymmetric source/drain and halo implantation region and a method of forming the same 有权
具有不对称源极/漏极和晕圈注入区的晶体管及其形成方法

Transistor having an asymmetric source/drain and halo implantation region and a method of forming the same
Abstract:
By providing an asymmetric design of a halo region and extension regions of a field effect transistor, the transistor performance may significantly be enhanced for a given basic transistor architecture. In particular, a large overlap area may be created at the source side with a steep concentration gradient of the PN junction due to the provision of the halo region, whereas the drain overlap may be significantly reduced or may even completely be avoided, wherein a moderately reduced concentration gradient may further enhance the transistor performance.
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