Invention Grant
US07208397B2 Transistor having an asymmetric source/drain and halo implantation region and a method of forming the same
有权
具有不对称源极/漏极和晕圈注入区的晶体管及其形成方法
- Patent Title: Transistor having an asymmetric source/drain and halo implantation region and a method of forming the same
- Patent Title (中): 具有不对称源极/漏极和晕圈注入区的晶体管及其形成方法
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Application No.: US11122740Application Date: 2005-05-05
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Publication No.: US07208397B2Publication Date: 2007-04-24
- Inventor: Thomas Feudel , Manfred Horstmann , Markus Lenski
- Applicant: Thomas Feudel , Manfred Horstmann , Markus Lenski
- Applicant Address: US TX Austin
- Assignee: Advanced Micro Devices, Inc.
- Current Assignee: Advanced Micro Devices, Inc.
- Current Assignee Address: US TX Austin
- Agency: Williams, Morgan & Amerson, P.C.
- Priority: DE102004042156 20040831
- Main IPC: H01L21/425
- IPC: H01L21/425 ; H01L21/22

Abstract:
By providing an asymmetric design of a halo region and extension regions of a field effect transistor, the transistor performance may significantly be enhanced for a given basic transistor architecture. In particular, a large overlap area may be created at the source side with a steep concentration gradient of the PN junction due to the provision of the halo region, whereas the drain overlap may be significantly reduced or may even completely be avoided, wherein a moderately reduced concentration gradient may further enhance the transistor performance.
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