发明授权
- 专利标题： Piezoelectric thin-film resonator and filter using the same
- 专利标题（中）： 压电薄膜谐振器和使用其的滤波器
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申请号： US10966035申请日： 2004-10-18
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公开(公告)号： US07211931B2公开(公告)日： 2007-05-01
- 发明人: Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Masafumi Iwaki , Tsutomu Miyashita
- 申请人： Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Masafumi Iwaki , Tsutomu Miyashita
- 申请人地址： JP Yokohama JP Kawasaki
- 专利权人： Fujitsu Media Devices Limited,Fujitsu Limited
- 当前专利权人： Fujitsu Media Devices Limited,Fujitsu Limited
- 当前专利权人地址： JP Yokohama JP Kawasaki
- 代理机构： Arent Fox LLP
- 优先权： JP2003-360054 20031020
- 主分类号： H01L41/08
- IPC分类号： H01L41/08
摘要：
A piezoelectric thin-film resonator includes a substrate, a lower electrode arranged on the substrate, a piezoelectric film arranged on the lower electrode, and an upper electrode arranged on the piezoelectric film. A region in which the upper electrode overlaps with the lower electrode through the piezoelectric film has an elliptical shape, and a condition such that 1
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