发明授权
- 专利标题: Ferroelectric thin film element, piezoelectric actuator and liquid discharge head
- 专利标题(中): 铁电薄膜元件,压电致动器和液体排出头
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申请号: US10772260申请日: 2004-02-06
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公开(公告)号: US07215067B2公开(公告)日: 2007-05-08
- 发明人: Toshihiro Ifuku , Tetsuro Fukui , Takanori Matsuda
- 申请人: Toshihiro Ifuku , Tetsuro Fukui , Takanori Matsuda
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2003-031669 20030207; JP2003-031680 20030207
- 主分类号: H01L41/04
- IPC分类号: H01L41/04 ; H01L41/16 ; H01L41/24
摘要:
A ferroelectric thin film element comprises a substrate and an epitaxial ferroelectric thin film provided on the substrate. The thin film satisfies z/z0>1.003 and 0.997≦x/x0≦1.003, where a crystal face of said thin film parallel to a crystal face of a surface of the substrate is taken as a Z crystal face, a face spacing of the Z crystal face is taken as z, a face spacing of the Z crystal face of a material constituting the thin film in a bulk state is taken as z0, a crystal face of the thin film perpendicular to the Z crystal face is taken as an X crystal face, a face spacing of the X crystal face is taken as x and a face spacing of the X crystal face of the material constituting the thin film in a bulk state is taken as x0.