发明授权
US07215471B2 Diffractive optical element, illumination system comprising the same, and method of manufacturing semiconductor device using illumination system
失效
衍射光学元件，包括该衍射光学元件的照明系统以及使用照明系统制造半导体器件的方法
- 专利标题： Diffractive optical element, illumination system comprising the same, and method of manufacturing semiconductor device using illumination system
- 专利标题（中）： 衍射光学元件，包括该衍射光学元件的照明系统以及使用照明系统制造半导体器件的方法
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申请号： US10874786申请日： 2004-06-22
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公开(公告)号： US07215471B2公开(公告)日： 2007-05-08
- 发明人: Chan Hwang
- 申请人： Chan Hwang
- 申请人地址： KR Suwon-si
- 专利权人： Samsung Electronics Co., Ltd.
- 当前专利权人： Samsung Electronics Co., Ltd.
- 当前专利权人地址： KR Suwon-si
- 代理机构： F. Chau & Associates, LLC
- 优先权： KR10-2003-0051118 20030724
- 主分类号： G02B27/44
- IPC分类号： G02B27/44 ; G00B5/18 ; G03H1/00
摘要：
An illumination system including a diffractive optical element (DOE) having an uneven surface that produces an illumination shape. The DOE comprising an uneven surface that produces a multipole illumination shape having angular scope element, wherein the angular scope element is a function of a radius and an angle of the produced multipole illumination shape, and wherein a position of the poles and sizes of the poles in an angular scope vary with a radial scope used in producing the multipole illumination shape, and a method of manufacturing a semiconductor device using the system.
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