发明授权
US07217590B2 Color image sensor with enhanced colorimetry and method for making same
有权
具有增强比色法的彩色图像传感器及其制作方法
- 专利标题: Color image sensor with enhanced colorimetry and method for making same
- 专利标题(中): 具有增强比色法的彩色图像传感器及其制作方法
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申请号: US10485695申请日: 2002-08-30
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公开(公告)号: US07217590B2公开(公告)日: 2007-05-15
- 发明人: Eric Pourquier , Louis Brissot , Gilles Simon , Alain Jutant , Philippe Rommeveaux
- 申请人: Eric Pourquier , Louis Brissot , Gilles Simon , Alain Jutant , Philippe Rommeveaux
- 申请人地址: FR Saint Egreve
- 专利权人: Atmel Grenoble S.A.
- 当前专利权人: Atmel Grenoble S.A.
- 当前专利权人地址: FR Saint Egreve
- 代理机构: Lowe Hauptman & Berner, LLP
- 优先权: FR0111334 20010831
- 国际申请: PCT/FR02/02978 WO 20020830
- 国际公布: WO03/019668 WO 20030306
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
The invention relates to very small-sized color image sensors.The sensor according to the invention is made by the following method: the formation, on the front face of the semiconductive wafer (10), of a series of active zones (ZA) comprising image detection circuits and each corresponding to a respective image sensor, each active zone comprising photosensitive zones (12) covered with conductive and insulating layers (14, 16) enabling the collection of electrical charges generated in the photosensitive zones, the transfer of the wafer (10) by its front face against the front face of a supporting substrate (20), the elimination of the major part of the thickness of the semiconductive wafer, leaving a very fine semiconductive layer (30) on the substrate, this fine semiconductive layer comprising the photosensitive zones, the deposition and etching of color filters (18) on the semiconductive layer thus thinned.
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