Invention Grant
- Patent Title: Semiconductor device and method for fabricating the same using damascene process
- Patent Title (中): 半导体装置及其制造方法,使用镶嵌工艺
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Application No.: US10678530Application Date: 2003-10-03
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Publication No.: US07217618B2Publication Date: 2007-05-15
- Inventor: Chang-Huhn Lee , Mun-Mo Jeong
- Applicant: Chang-Huhn Lee , Mun-Mo Jeong
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Marger Johnson & McCollom, P.C.
- Priority: KR2002-63979 20021018
- Main IPC: H01L21/8242
- IPC: H01L21/8242

Abstract:
A semiconductor device and method for fabricating same according to an embodiment of the invention includes: preparing a semiconductor substrate having a first contact pad and a second contact pad; forming a first insulating film on the substrate; etching the first insulating film to form a groove-shaped bit line pattern and a contact exposing the first contact pad and the second contact pad, respectively; simultaneously forming a contact plug and a bit line in the contact and the bit line pattern, respectively, the contact plug and the bitline having upper surfaces that are coplanar; and forming a bottom electrode for a capacitor that is connected to the first contact pad.
Public/Granted literature
- US20040077143A1 Semiconductor device and method for fabricating the same using damascene process Public/Granted day:2004-04-22
Information query
IPC分类: