发明授权
- 专利标题: Recessed gate for an image sensor
- 专利标题(中): 嵌入式门用于图像传感器
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申请号: US10905097申请日: 2004-12-15
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公开(公告)号: US07217968B2公开(公告)日: 2007-05-15
- 发明人: James W. Adkisson , John Ellis-Monaghan , Mark D. Jaffe , Jerome B. Lasky
- 申请人: James W. Adkisson , John Ellis-Monaghan , Mark D. Jaffe , Jerome B. Lasky
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Anthony J. Canale
- 主分类号: H01L31/062
- IPC分类号: H01L31/062
摘要:
A novel image sensor cell structure and method of manufacture. The imaging sensor comprises a substrate, a gate comprising a dielectric layer and gate conductor formed on the dielectric layer, a collection well layer of a first conductivity type formed below a surface of the substrate adjacent a first side of the gate conductor, a pinning layer of a second conductivity type formed atop the collection well at the substrate surface, and a diffusion region of a first conductivity type formed adjacent a second side of the gate conductor, the gate conductor forming a channel region between the collection well layer and the diffusion region. Part of the gate conductor bottom is recessed below the surface of the substrate. Preferably, a portion of the gate conductor is recessed at or below a bottom surface of the pinning layer to a depth such that the collection well intersects the channel region.
公开/授权文献
- US20060124976A1 RECESSED GATE FOR AN IMAGE SENSOR 公开/授权日:2006-06-15