发明授权
- 专利标题： Inkjet head and a method of manufacturing the same
- 专利标题（中）： 喷墨头及其制造方法
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申请号： US10890261申请日： 2004-07-14
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公开(公告)号： US07226150B2公开(公告)日： 2007-06-05
- 发明人: Yasuhiro Yoshimura , Jun Nagata , Osamu Machida , Tatsuya Nagata
- 申请人： Yasuhiro Yoshimura , Jun Nagata , Osamu Machida , Tatsuya Nagata
- 申请人地址： JP Tokyo JP Minato-Ku
- 专利权人： Hitachi, Ltd.,Ricoh Printing Systems Co., Ltd.
- 当前专利权人： Hitachi, Ltd.,Ricoh Printing Systems Co., Ltd.
- 当前专利权人地址： JP Tokyo JP Minato-Ku
- 代理机构： McDermott Will & Emery LLP
- 优先权： JP2003-196215 20030714
- 主分类号： B41J2/045
- IPC分类号： B41J2/045
摘要：
An inkjet head is provided and includes: a chamber substrate for forming an ink flow passage; a diaphragm substrate including a diaphragm for pressurizing a pressure chamber disposed in the chamber substrate; and a nozzle substrate for jetting ink pressurized by the diaphragm, wherein the diaphragm substrate is made of silicon, the diaphragm is made of a material selected from the group of silicon oxide film and metal film, and the diaphragm is formed in the diaphragm substrate. A method of manufacturing the inkjet head is also provided.
公开/授权文献
- US20050012782A1 Inkjet head and a method of manufacturing the same 公开/授权日：2005-01-20
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