Invention Grant
- Patent Title: Knife edge tracking system and method
- Patent Title (中): 刀刃追踪系统及方法
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Application No.: US10719880Application Date: 2003-11-20
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Publication No.: US07227580B2Publication Date: 2007-06-05
- Inventor: Steven Kasapi , Amit Nabarro , Ofir Baharav
- Applicant: Steven Kasapi , Amit Nabarro , Ofir Baharav
- Applicant Address: US CA Milpitas
- Assignee: Credence Systems Corporation
- Current Assignee: Credence Systems Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Sughrue Mion. PLLC
- Agent Joseph Bach
- Main IPC: G03B7/00
- IPC: G03B7/00 ; G01R31/02

Abstract:
A system and method for automatically and accurately determining the exact location of a knife-edge, such as an edge of an optical shutter, so that it can be controlled automatically. In one aspect the system comprises a mechanized shutter coupled to a shutter controller that can automatically control the shutter's location and movement. According to one implementation of the shutter controller the system takes a first image at a first shutter position. The shutter is then moved a predetermined about and a second image is taken. Then, the pixels of each image are added in the direction perpendicular to the movement of the shutter, so as to provide two one-dimension functions. A linear difference of the functions is then taken, so as to obtain a one-dimensional linear difference function. A peak in the linear difference function is then identified as the location of the shutter.
Public/Granted literature
- US20050110893A1 Knife edge tracking system and method Public/Granted day:2005-05-26
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