发明授权
US07230699B1 Sample orientation system and method 有权
样本取向系统和方法

Sample orientation system and method
摘要:
Disclosed is a system comprising a stage with “X”, “Y” and “Z” translation and “X”, “Y” and optionally “Z” axes rotation capability, in combination with interrogation and monitoring means which act in functional combination to orient the surface of a sample so as to set an intended oblique approach of an electromagnetic beam with respect to a sample surface at a monitored location thereon.
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