发明授权
- 专利标题: Sample orientation system and method
- 专利标题(中): 样本取向系统和方法
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申请号: US10652696申请日: 2003-09-02
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公开(公告)号: US07230699B1公开(公告)日: 2007-06-12
- 发明人: Martin M. Liphardt , Ping He
- 申请人: Martin M. Liphardt , Ping He
- 申请人地址: US NE Lincoln
- 专利权人: J.A. Woollam Co., Inc.
- 当前专利权人: J.A. Woollam Co., Inc.
- 当前专利权人地址: US NE Lincoln
- 代理商 James D. Welch
- 主分类号: G01J4/00
- IPC分类号: G01J4/00
摘要:
Disclosed is a system comprising a stage with “X”, “Y” and “Z” translation and “X”, “Y” and optionally “Z” axes rotation capability, in combination with interrogation and monitoring means which act in functional combination to orient the surface of a sample so as to set an intended oblique approach of an electromagnetic beam with respect to a sample surface at a monitored location thereon.
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