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US07232712B2 CMOS image sensor and method for fabricating the same 有权
CMOS图像传感器及其制造方法

  • Patent Title: CMOS image sensor and method for fabricating the same
  • Patent Title (中): CMOS图像传感器及其制造方法
  • Application No.: US10975200
    Application Date: 2004-10-28
  • Publication No.: US07232712B2
    Publication Date: 2007-06-19
  • Inventor: Chang Hun Han
  • Applicant: Chang Hun Han
  • Applicant Address: KR Seoul
  • Assignee: Dongbu Electronics Co., Ltd.
  • Current Assignee: Dongbu Electronics Co., Ltd.
  • Current Assignee Address: KR Seoul
  • Agent Andrew D. Fortney
  • Priority: KR10-2003-0075417 20031028; KR10-2003-0075424 20031028; KR10-2003-0101547 20031231
  • Main IPC: H01L21/339
  • IPC: H01L21/339
CMOS image sensor and method for fabricating the same
Abstract:
A CMOS image sensor and a method for fabricating the same is disclosed, to decrease a darkcurrent generated in the boundary between a diffusion area of a photodiode and a device isolation layer, which includes a first conductive type semiconductor substrate having an active area and a device isolation area, the active area including a photodiode and a transistor; a device isolation layer formed in the device isolation area of the semiconductor substrate; a second conductive type diffusion area formed in the photodiode of the semiconductor substrate at a predetermined interval from the device isolation layer; a gate insulating layer and a gate electrode formed in the transistor of the semiconductor substrate; and a first conductive type first diffusion area formed in the semiconductor substrate of the boundary between the second conductive type diffusion area and the device isolation layer.
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