发明授权
- 专利标题: Process for fabricating pad frame and integrated circuit package
- 专利标题(中): 制造衬垫框架和集成电路封装的工艺
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申请号: US11194993申请日: 2005-08-02
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公开(公告)号: US07232755B1公开(公告)日: 2007-06-19
- 发明人: Neil McLellan , Chun Ho Fan , Kwok Cheung Tsang , Kin Pui Kwan
- 申请人: Neil McLellan , Chun Ho Fan , Kwok Cheung Tsang , Kin Pui Kwan
- 申请人地址: HK Tsuen Wan, New Territories
- 专利权人: ASAT Ltd.
- 当前专利权人: ASAT Ltd.
- 当前专利权人地址: HK Tsuen Wan, New Territories
- 代理机构: Morrison & Foerster LLP
- 主分类号: H01L21/44
- IPC分类号: H01L21/44
摘要:
A process for fabricating a pad frame for an integrated circuit package includes building up metal on selective portions of a first side of a substrate to define a plurality of contact pads disposed in a first layer of dielectric material, depositing a metal seed layer on an exposed side of the contact pads and the dielectric material, applying a second metal layer on the metal seed layer, selectively etching the second metal layer and the metal seed layer to provide pad frame circuitry, and building up metal on selective portions of the pad frame circuitry to define a plurality of die connect pads separated by a second layer of dielectric material, the die connect pads being electrically connected to the contact pads by the pad frame circuitry.
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