发明授权
- 专利标题： Distribution of energy in a high frequency resonating wafer processing system
- 专利标题（中）： 在高频谐振晶片处理系统中的能量分布
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申请号： US10371679申请日： 2003-02-20
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公开(公告)号： US07237564B1公开(公告)日： 2007-07-03
- 发明人: Tom Anderson , John M. Boyd
- 申请人： Tom Anderson , John M. Boyd
- 申请人地址： US CA Fremont
- 专利权人： Lam Research Corporation
- 当前专利权人： Lam Research Corporation
- 当前专利权人地址： US CA Fremont
- 代理机构： Martine Penilla & Gencarella, LLP
- 主分类号： B08B3/00
- IPC分类号： B08B3/00 ; B06B1/06
摘要：
A transducer for use in an acoustic energy cleaner is provided. The transducer includes a resonator and a plurality of crystals bonded to a surface of the resonator. The plurality of crystals is configured to be bonded to the surface of the resonator in a staggered arrangement with respect to each other. In one embodiment, the plurality of crystals is bonded to the surface of the resonator in a horizontally staggered arrangement. In another embodiment, the plurality of crystals is bonded to the surface of the resonator in a vertically staggered arrangement.
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